Silicon Carbide Chuck

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Silicon carbide ceramics have excellent mechanical properties, such as high strength and hardness, as well as excellent high-temperature stability, such as high thermal conductivity and low thermal expansion coefficient. They are often used as suction cups in precision machining, semiconductor manufacturing, optoelectronics industry, and other fields that require high precision and durability. In the semiconductor production process, very thin wafers are often placed on silicon carbidechuck,connected to vacuum generators, and vacuum suction is used to fix the wafers, making it convenient for waxing, thinning, dewaxing, cleaning, and cutting the wafers. The suction cups are formed by isostatic pressing and high-temperature sintering.

Edgetech can finish according to the requirements of the drawings and use sandblasting to make convex points to meet the requirements of use.

Silicon Carbide Ceramic Properties

Performance advantages of Silicon Carbide Ceramic Chunks

-Precise size and thermal stability, flatness of 0.3-0.5μm

-Extremely high wear resistance and surface finish, small and evenly distributed pores, can evenly adsorb all areas of the wafer

-Good thermal conductivity, low expansion coefficient, and temperature uniformity

-Excellent acid and alkali corrosion resistance

-Good thermal conductivity to shorten the waxing and waxing process time, improve production rate, and increase production efficiency

-Small and evenly distributed pores, can evenly adsorb all tiny local areas of the whole wafer

Typical applications of SiC Ceramic Chunk

-In semiconductor manufacturing, place extremely thin wafers on silicon carbide vacuum chucks, connect vacuum generators, and use vacuum suction to fix wafers.

-Applied to processes such as photolithography, etching, laser processing, and wafer inspection.

Sintering methods for Silicon Carbide

We mainly provide reaction-sintered silicon carbide (RBSiC), pressureless-sintered silicon carbide (SSiC), and recrystallized silicon carbide (RSiC) ceramic products.
The advantages of RBSiC are low sintering temperature, low production cost, and high material densification degree. In particular, the volume shrinkage during reaction sintering is very small, which is particularly suitable for the preparation of large-sized and complex-shaped structural parts. High-temperature kiln furniture, radiation tubes, cold air ducts, nozzles, etc. are typical applications of RBSiC ceramics.
SSiC densifies silicon carbide powder through a high-temperature sintering process without applying additional pressure, and the shrinkage rate of SSiC products is relatively large.
The density, flexural strength, and compressive strength of RBSiC are lower than those of SSiC products, and the maximum operating temperature of RBSiC ceramic products is 1380℃, which is lower than the temperature resistance of SSiC products at 1600℃. SSiC products are more resistant to strong acid and alkali corrosion than reaction-sintered silicon carbide products.
RSiC has a high sintering temperature (2100~2300 ℃), is resistant to high temperatures, and its maximum operating temperature can reach 1650 degrees. The product is loose inside, has high porosity, has a higher thermal expansion coefficient than reactive/pressureless sintered silicon carbide, and has excellent high-temperature resistance and thermal shock resistance.

We provide SiC ceramic rods, tubes, sheets, plates, discs, and customized parts. Other ceramics include Hot pressed Boron Nitride (HBN), Pyrolytic Boron Nitride (PBN), Silicon Nitride (Si3N4), Aluminum Nitride (AlN), Zirconia (ZrO2), Alumina (Al2O3), Lanthanum Hexaboride (LaB6), Cerium Boride (CeB6), Silicon Carbide (SiC), Boron Carbide (B4C), etc. Customized and complex ceramic parts are available on request.

Packing of SiC Ceramics

Our Silicon Carbide Chucks are carefully handled to minimize damage during storage and transportation and to preserve the quality of our products in their original condition.