Ion Implantation Components

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Ion implantation is an important process in the manufacture of semiconductors, the most important part of an implanter system is the beam path in which components are engaged. Here, the ions are generated, concentrated, accelerated, and targeted towards the wafer. Our ion implantation components are made from molybdenum and tungsten due to these materials ideal combination of corrosion resistance, strength, and high thermal conductivity.

Molybdenum Ion Implantation Components Properties
-High Melting point
-Outstanding creep resistance
-Excellent corrosion resistance
-Good electrical and thermal conductivity
-Outstanding purity

Our products for the semiconductor industry:
-Chambers (tungsten, molybdenum and alloys)
-Filaments (tungsten and tungsten alloys)
-Arc slits (tungsten, molybdenum and alloys)
-Holders (tungsten, molybdenum and alloys)
-Cathodes (tungsten, molybdenum and alloys)
-Spare parts (tungsten, molybdenum and alloys, ceramics)

Contact us at sales@edge-techind.com for inquiries on ion implantation components made by tungsten and molybdenum.

Ion implantation is a low temperature process by which ions of an element are accelerated into a solid target, thereby changing the physical, chemical or electrical properties of the target. Ion implantation is used in semiconductor device manufacturing, metal finishing and materials science research.

Pictures for Ion Implantation Components

• Molybdenum Components
• Tungsten Components

Related products: Furnace Parts, Molybdenum Heat Shield, Molybdenum Crucible, Tungtsen Heater, Molybdenum Wire, Molydebum Rod, Molybdenum Strip.