Non-ferrous Metals

Deposition Materials

Rare Earth Elements

Semiconductor Elements

Functional Materials

Ion Implantation Components

Ion implantation is an important process in the manufacture of semiconductors. The most important part of an implanter system is the beam path. Here, the ions are generated, concentrated, accelerated, and targeted towards the wafer.
Our ion implantation components are made from molybdenum and tungsten due to these materials ideal combination of corrosion resistance, strength, and high thermal conductivity.

Ion Implantation Components Properties:
-High Melting point
-Outstanding creep resistance
-Excellent corrosion resistance
-Good electrical and thermal conductivity
-Outstanding purity

Our products for the semiconductor industry:
-Chambers (tungsten, molybdenum and alloys)
-Filaments (tungsten and tungsten alloys)
-Arc slits (tungsten, molybdenum and alloys)
-Holders (tungsten, molybdenum and alloys)
-Cathodes (tungsten, molybdenum and alloys)
-Spare parts (tungsten, molybdenum and alloys, ceramics, steel)

Contact us at sales@edge-techind.com for inquiries on ion implantation components made by tungsten and molybdneum.

Pictures for Ion Implantation Components

  • Ion Implantation Components
  • Ion Implantation Components

Related products: Furnace Parts, Molybdenum Heat Shield, Molybdenum Crucible, Tungtsen Heater, Molybdenum Wire, Molydebum Rod, Molybdenum Strip.


EdgeTech Industries LLC16518 SW 36th St, Miramar, FL 33027sales@edge-techind.com